;define parameter
(define Ltot 10) ;total size of the device
(define Hp+ 0.2 ) ;thickness of the p+ layer
(define Hp 0.2 )
(define Hn 0.25 ) ;thickness of the n layer
(define Hn- 1 ) ;thickness of the n- layer
(define Hbu 0.5 ) ;thickness of the buffer layer
(define Hsub 2 ) ;thickness of the substrate
;derived quantities x values of bottom layers
(define Xsub (* Ltot 0.5))
;y values of each bottom layers
(define Yp+ Hp+)
(define Yp (+ Yp+ Hp))
(define Yn (+ Yp Hn ))
(define Yn- (+ Yn Hn- ))
(define Ybu (+ Yn- Hbu))
(define Ysub (+ Ybu Hsub ))
; Overlap resolution: New replaces Old
(sdegeo:set-default-boolean "ABA")
; Creating sub
(sdegeo:create-rectangle
(position (* Xsub -1.0) Ysub 0.0 )
(position Xsub Ybu 0.0 )
"SiliconCarbide" "region_1"
)
; Creating buffer layer
(sdegeo:create-rectangle
(position (* Xsub -1.0) Ybu 0.0 )
(position Xsub Yn- 0.0 )
"SiliconCarbide" "region_2"
)
; Creating n-
(sdegeo:create-rectangle
(position (* Xsub -1.0) Yn- 0.0 )
(position Xsub Yn 0.0 )
"SiliconCarbide" "region_3"
)
; Creating n
(sdegeo:create-rectangle
(position (* Xsub -1.0) Yn 0.0 )
(position Xsub Yp 0.0 )
"SiliconCarbide" "region_4"
)
; Creating p+
(sdegeo:create-rectangle
(position (* Xsub -1.0) Yp 0.0 )
(position Xsub Yp+ 0.0 )
"SiliconCarbide" "region_5"
)
(sdegeo:create-rectangle
(position (* Xsub -1.0) Yp+ 0.0 )
(position Xsub 0.0 0.0 )
"SiliconCarbide" "region_6"
)
(sdegeo:define-contact-set "anode" 4.0 (color:rgb 1.0 0.0 0.0 ) "##")
(sdegeo:define-contact-set "cathode" 4.0 (color:rgb 0.0 1.0 1.0 ) "##")
(sdegeo:define-2d-contact
(find-edge-id (position 0.0 0.0 0.0))
"anode")
(sdegeo:define-2d-contact
(find-edge-id (position 0.0 Ysub 0.0))
"cathode")
; Separating lumps
(sde:assign-material-and-region-names "all")
(sdedr:define-constant-profile "const.sub"
"NitrogenConcentration" 1e21)
(sdedr:define-constant-profile-region "placeCD.sub"
"const.sub" "region_1")
(sdedr:define-constant-profile "const.n-"
"NitrogenConcentration" 1e15)
(sdedr:define-constant-profile-region "placeCD.n-"
"const.n-" "region_3")
(sdedr:define-constant-profile "const.n"
"NitrogenConcentration" 4e17)
(sdedr:define-constant-profile-region "placeCD.n"
"const.n" "region_4")
(sdedr:define-constant-profile "const.p"
"AluminumConcentration" 1e18)
(sdedr:define-constant-profile-region "placeCD.p"
"const.p" "region_5")
(sdedr:define-constant-profile "const.p+"
"AluminumConcentration" 2e19)
(sdedr:define-constant-profile-region "placeCD.p+"
"const.p+" "region_6")
(sdedr:define-constant-profile "const.buff"
"NitrogenConcentration" 1e18)
(sdedr:define-constant-profile-region "placeCD.buff"
"const.buff" "region_2")
;build mesh
(sdedr:define-refeval-window "RefWin.n3"
"Rectangle" (position (* Xsub -1.0) Yn- 0.0) (position Xsub Yp 0.0))
(sdedr:define-multibox-size "RefDefMB.n3"
0.04 0.2
0.02 0.05
1 1.5
)
(sdedr:define-refinement-function "RefDefMB.n3" "DopingConcentration"
"MaxTransDiff" 1 "DoubleSide")
(sdedr:define-multibox-placement "PlaceMB.n3"
"RefDefMB.n3" "RefWin.n3" )
(sdedr:define-refeval-window "RefWin.n5"
"Rectangle" (position (* Xsub -1.0) Yp 0.0) (position Xsub (- Yp 0.1) 0.0))
(sdedr:define-multibox-size "RefDefMB.n5"
0.04 0.05
0.02 0.05
1 -1.5
)
(sdedr:define-multibox-placement "PlaceMB.n5"
"RefDefMB.n5" "RefWin.n5" )
(sdedr:define-refeval-window "RefWin.n6"
"Rectangle" (position (* Xsub -1.0) Yp 0.0) (position Xsub 0.0 0.0))
(sdedr:define-multibox-size "RefDefMB.n6"
0.04 0.2
0.02 0.05
1 1.5
)
(sdedr:define-multibox-placement "PlaceMB.n6"
"RefDefMB.n6" "RefWin.n6" )
(sdedr:define-refinement-window "RefWin.n4"
"Rectangle" (position (* Xsub -1.0) Ysub 0) (position Xsub Yn- 0))
(sdedr:define-multibox-size "RefDefMB.n4"
2 1
0.4 0.2
1 1.5
)
(sdedr:define-multibox-placement "PlaceMB.n4"
"RefDefMB.n4" "RefWin.n4" )
(sdedr:define-refeval-window "RefWin.n7"
"Rectangle" (position (* Xsub -1.0) Yn 0.0) (position Xsub Yp+ 0.0))
(sdedr:define-multibox-size "RefDefMB.n7"
0.04 0.2
0.02 0.05
1 -1.5
)
(sdedr:define-multibox-placement "PlaceMB.n7"
"RefDefMB.n7" "RefWin.n7" )
(sde:build-mesh "snmesh" "" "n@node@_msh")
五层的SAM-APD结构，为了保证实验效果在p+区下加了层轻掺杂p区。
sentaurus仿真跑的挺慢的，一个点要一个多小时。五月就要盲审了，仿真结束大概还要15天。
转载于:https://www.cnblogs.com/kraken7/p/8907831.html
相关资源：Sentaurus 最新最全手册2020.0625.rar
